Superconductivity Fabrication Equipment

Niobium trilayer sputtering system

ECR CVD system for SiO2 insulation

10:1 Projection printer for lithography

Pd resistor and contact pad evaporator

Reactive ion etching system

Other Key Equipment

1:1 contact printer

Back-up capability for some fabrication systems

Pattern generation for masks

Dicing saw and wire bonder

Flip-chip bump-bonding facility

Profilimeter,ellipsometer, SEM, AFM, flatguage, various other analytical tools

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